Ventex provides fully tested new, refurbished and repaired spare parts for your Canon stepper. We have been designing and manufacturing semiconductor equipment spare parts to exacting standards for our customers since 1994. All of our parts are inspected and fully tested to ensure they meet or exceed OEM specifications.

Search our catalog to find the part you need or call us for any special or custom requirements you may have.

Ventex is providing spare parts for the following Canon Steppers


  • FPA-1550Mk4W
  • FPA-2000i1
  • FPA-2500i2
  • FPA-2500i3
  • FPA-3000i4
  • FPA-3000iW
  • FPA-3000MR
  • FPA-3000i5
  • FPA-3000i5+
  • FPA-3000i5++
  • FPA-3000Ex3
  • FPA-3000Ex4
  • FPA-3000Ex5
  • FPA-3000Ex6
Canon Spare Parts

Canon

Canon

Custom Spare Parts

Custom

Custom