Parts, Custom Solutions, and Catalog

Delivering timely and cost-effective parts and solutions to support your fab. Explore our catalog to find the parts you need to keep your operation running smoothly. We provide Canon parts, track parts, and can custom engineer parts specific to your needs.

Tested, High-Quality Parts and Custom Solutions

At Ventex, we don’t just supply parts – we solve problems. Our comprehensive parts inventory and custom engineering capabilities ensure you have access to exactly what you need, when you need it, even for legacy equipment that OEMs no longer support. Our inventory extends across a wide range of parts and components including gears, mercury lamps, optics, chucks, relays, SCH robots, cassette robots, reticle robots, PCBs, chamber fans, reticle cassettes, cymers, lasers, and many more Canon and track parts!

Ventex provides an extensive inventory of new and refurbished Canon Stepper, Canon Scanner, and Track parts that meet or exceed OEM specifications – at a fraction of the cost. We perform rigorous testing and validation on these parts in our dedicated facility. Our refurbishment process includes functionality testing, calibration verification, and performance validation – engineering-grade quality assurance, not just visual inspection.

Why choose Ventex for Canon Stepper, Canon Scanner, and Track parts?

  • High-quality performance: Parts are tested to the same standards as original equipment, ensuring consistent results in your production environment
  • Cost savings without compromise: Reduce parts spending while maintaining the quality your processes demand
  • Extensive inventory: From optical components and stage assemblies to control electronics and environmental systems, we maintain a deep stock of critical Canon photolithography parts
  • Legacy equipment support: We specialize in hard-to-find parts for older equipment, extending the productive life of your tools
  • Fast availability: Our team understands the criticality of keeping your tools running, and we prioritize delivering your parts to minimize downtime

When discontinued components, obsolete subsystems, or unique tool configurations require custom solutions, Ventex’s engineering expertise sets us apart. We reverse-engineer, redesign, and manufacture replacement parts when original sources are unavailable, combining modern design tools with deep photolithography knowledge to create parts that meet or exceed original specifications.

Our custom parts process:

  • Consultation and assessment: We collaborate with your team to fully understand the parts you need, their function, and the specifications they must meet
  • Design and engineering: Our engineers develop custom solutions using CAD modeling, materials analysis, and performance simulation
  • Prototyping and testing: We manufacture prototype parts and conduct rigorous testing to validate performance before production
  • Manufacturing and quality control: Production parts are manufactured with strict quality controls and documentation
  • Validation and support: We provide installation support and work with your team to validate in-tool performance

What we can custom engineer:

  • Parts needed for special wafer sizes
  • Custom wafer handling kits
  • Wafer carriers
  • And more

Catalog

From refurbished and tested parts to new and hard-to-find components, our inventory is designed to help you maximize uptime.

Search our catalog by part number (SKU) or keyword (Product Name).

SKU

Category

Product Name

Product

BD3-4737-000V
Vacuum Pad (Cassette Robot Hand Assy) ( Set of 3 pads)..
Y75-1152-000V
Vacuum Gauge
BF6-2699-000V
Vacuum Finger (R)
BF6-2700-000V
Vacuum Finger (L)
BD2-3998-020V
Vacuum Cup, 3rd Station
LAMP-026V
UXL-5150ML (Ushio) KLA 5100 Lamp..
VEN-0368-000V
UV Meter Probe
VEN-0369-000V
UV Meter
LAMP-014V
UV Igniter Lamp
OPTIC-014V
UV Block Filter..

Getting Started Is Easy

Need help finding the right solution? Connect with one of our experts to:

  • Check real-time parts availability
  • Get a quote for your specific part needs
  • Discuss custom engineering solutions
  • Establish a long-term parts partnership

Let's keep your fab up and running!