XY-Stage-IF

Part Number: BG9-3718-000V

Manufacturer: Canon

XY-Stage-IF

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Y ball screw (rolling type) i3

Part Number: BG4-4472-000V

Manufacturer: Canon

For Canon FPA2500i2/i3 Y stage

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Y-Stage Motor (300mm)

Part Number: Y60-0596-000V

Manufacturer: Canon

Y-Stage Motor (300mm)

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Z ball screw unit

Part Number: Y60-0812-000V

Manufacturer: Canon

Z ball screw unit which is field replaceable on the newer style Mk4, 2000i1, 2500i2/i3 & i4/iW tilt stages.

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Zygo 7701 CE Laser Head

Part Number: BG4-5372-020V

Manufacturer: Canon

Zygo 7701 CE Laser Head

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Zygo HeNe Laser Head

Part Number: BG3-5372-020V

Manufacturer: Canon

Zygo He-Ne Laser Head

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Zygo-Laser-Head-Model-7702

Part Number: BG3-6723-000V

Manufacturer: Canon

Zygo-Laser-Head-Model-7702

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